All-Glass Grayscale Photomasks Enable New Technologies
True Grayscale Photomasks
Photomask

All-Glass Grayscale Photomasks
for the USA and Beyond

CANYON MATERIALS, INC. (CMI) specializes in fabricating true grayscale (not halftone) photomasks used in grayscale photolithography to produce 3D microstructures. The all-glass grayscale photomasks we offer enable mass fabrication of 3D microstructures, such as:

• Refractive Microlens Arrays
• Diffractive Optical Elements (DOE)

• Tapered Structures for Microelectronic and Micromechanical Devices
• Beam-Shaping Elements

Our products also enable the fabrication of apodization filters and various grayscale transmission filters, including single-frequency sinusoidal gratings with zero harmonic distortion. Successful optoelectronic consumer products and medical devices containing key optical elements made using our all-glass grayscale photomask technology have been growing in number on the worldwide market.
Over 40 Years of Industry Experience

Contact us to learn more about our grayscale photomask blanks.

Overview

CMI’s All-Glass Grayscale Photomask Technologies Include

• HEBS-Glasses and LDW-Glasses

• HEBS-Glass and LDW-Glass Grayscale Photomasks

• Exemplary Utility of the 3D Microstructures

• Method of Making 3D Microstructures Using an All-Glass Grayscale Photomask

Photomasks for Mass Production of Microstructures

Product TypePhoto Tools for Mass Fabrication
2D Microstructures, e.g., IC ChipsChrome on Glass Photomask
3D Microstructures, e.g., MicroopticsHEBS-Glass and LDW-Glass Grayscale Photomasks*
*7 USA patents having 458 patent claims related to HEBS- and LDW-glasses were granted to Che-Kuang (Chuck) Wu and assigned to CMI.