Custom HEBS-Glass

CMI creates custom HEBS-glass gray-level masks to customer specifications. These gray-level masks enable the mass fabrication of 3D microstructures, which are used in several fields of microtechnology, including:

• Diffractive and Holographic Devices

• Optical Interconnects

• Integrated Optics

• Micro-Optics and Micro-Mechanics

The Process of Making HEBS-Glass and LDW-Glass

Base silicate glass compositions are so formulated that, upon a surface chemical treatment on the base glass, nanoparticles having the following properties are created in the nanometer size cavities.

• A HEBS-glass grayscale photomask with gray images in clear background is made by E-beam exposures with a range of electron dosage levels.

• An LDW-glass grayscale photomask with gray images in dark background is made by exposures to a focused laser beam using a heat erasure recording mode.